| 摘要 |
PROBLEM TO BE SOLVED: To secure the sufficient tilt angle of a mirror and driving power with a simplified structure. SOLUTION: A micromirror is so composed that at least one of first movable electrodes is arranged at upper position than its adjacent fixed electrode, at least one of the rest of the first movable electrodes is arranged at lower position than its adjacent fixed electrode, at least one of second movable electrodes is arranged at upper position than its adjacent fixed electrode, and at least one of the rest of the second movable electrodes is arranged at lower position than its adjacent fixed electrode. COPYRIGHT: (C)2007,JPO&INPIT
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