发明名称 |
Detecting and characterizing mask blank defects using angular distribution of scattered light |
摘要 |
An embodiment of the present invention is a technique to inspect defects in mask blanks. A first iris diaphragm is located at an illumination source to limit an illumination angle of light emitted from the illumination source. A scattering limit unit is located at exit of a dark field optical unit to limit scattering angle of the light scattered after reflecting from a mask blank. A defect analyzer is optically coupled to the dark field optical unit to generate an angular distribution of the scattered light. The angular distribution is used to characterize criticality of a defect found on the mask blank.
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申请公布号 |
US2007158636(A1) |
申请公布日期 |
2007.07.12 |
申请号 |
US20050323258 |
申请日期 |
2005.12.30 |
申请人 |
INTEL CORPORATION |
发明人 |
TEZUKA YOSHIHIRO |
分类号 |
H01L29/06;G01N21/956;G03F1/24;G03F1/60;G03F1/84;H01L21/027 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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