| 摘要 |
A transmission image sensor is provided that is optimized for detection of an alignment marker that includes gratings, which are used to detect the position of a part of an overlay marker, e.g. of box-in-box type. Both the alignment markers and the overlay markers may be used to derive a measurement of magnification of a projection system. Magnification values obtained from the overlay marker components using the transmission image sensors link the values conventionally obtained using the transmission image sensor to detect alignment markers and an off-line tool to detect overlay markers.
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