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发明名称
Vorrichtung und Verfahren zur Herstellung einer Dünnschicht
摘要
申请公布号
DE69936216(D1)
申请公布日期
2007.07.12
申请号
DE19996036216
申请日期
1999.12.23
申请人
SHINCRON CO. LTD.
发明人
MATSUMOTO, SHIGEHARU;KIKUCHI, KAZUO;SONG, YIZHOU;SAKURAI, TAKESHI;SAISHO, SHINICHIRO
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
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