| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection unit of a device for high frequency and high speed that prevents the invasion of noise from the outside similarly to a metal block, performs high-frequency impedance matching, and can inexpensively manufacture a probe for an PF signal in a coaxial structure also with the electrode terminal of a narrow pitch. <P>SOLUTION: A ground block 2 is formed by disposing an insulating block 21 having through holes 22 and plating coat 23 on the outer surface of the insulating block 21 and on the exposed surface of at least a part of the through holes 22. The probe 1SIG for the PF signal, a probe 1GND for ground, and a probe 1POW for power supply are inserted into the through holes 22 in the ground block 2, and a wiring terminal of a wiring board connected to an inspecting device (not shown) disposed on the other surface side of the ground block 2 is connected to an electrode terminal such as an IC (not shown) to be inspected disposed on one surface side of the ground block 2 through each probe 1, thereby performing the inspection. <P>COPYRIGHT: (C)2007,JPO&INPIT |
