| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing the optical element of a wire grid type, capable of freely controlling the duty ratio of wire grid in simple steps and easily obtaining the desired optical characteristics. <P>SOLUTION: The method for manufacturing optical element includes a step for forming a metal layer 12a on a light-transmitting dielectric substrate 11A, a step for patterning the metal layer 12a to form a grid-like metal film 12M, and a step for performing heat processing of the grid-like metal film 12M in a gas atmosphere to modify the surface part of the metal film 12M, and to form a dielectric film 12D2 on the surface. <P>COPYRIGHT: (C)2007,JPO&INPIT |
