| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate support device capable of supporting a substrate in a cleaner state while suppressing falling-off or breakage of a spacer member. SOLUTION: The substrate support device is provided with an aluminum-alloy-made plate member 20 having a flat upper face 22, a bottomed hole 40 formed in the plate member 20, and the spacer member 42 stored in the hole 40. The spacer member 42 is a spherical body made of sapphire. The diameter D1 of the spacer member 42 is slightly smaller than the inner diameter D2 of the hole 40. The upper end 42a of the spacer member 42 is protruded from the upper face 22 of the plate member 20. A counterbore 50 is formed in a region including the opening edge 45 of the hole 40. A caulking part 55, in which the opening edge 45 of the hole 40 is plastically deformed toward the spacer member 42, is formed in the bottom face 50a of the counterbore part 50. A V-shaped groove 60 is formed behind the caulking part 55. COPYRIGHT: (C)2007,JPO&INPIT |
