摘要 |
A memory device includes an array of memory cells and a storage capacitor for storing information. Each memory cell includes an access transistor. The access transistor includes first and second source/drain regions, a channel disposed between the first and the second source/drain regions, and a gate electrode electrically insulated from the channel and adapted to control the conductivity of the channel. The access transistor is at least partially formed in the semiconductor substrate. The storage capacitor is adapted to be accessed by the access transistor. The storage capacitor includes at least first and second storage electrodes and at least a capacitor dielectric disposed between the first and the second storage electrodes. Each of the first and the second storage electrodes is disposed above the substrate surface.
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