| 摘要 |
Methods, systems, and apparatuses for removing dies attached to a support element are described. The support element has a first surface to which the dies are attached and a second surface that opposes the first surface. In a first example, a first vacuum is applied to the second surface outside an area defined on the second surface. At least one force element applies a force to the second surface inside the area, thereby moving a plurality of dies with respect to other dies. In a second example, heat is applied to an adhesive between the first surface and the plurality of dies to at least partially deactivate the adhesive. A second vacuum is applied to the plurality of dies to remove the plurality of dies from the first surface.
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