| 摘要 |
<p>A developer supplying nozzle apparatus is provided to prevent a nozzle hole from being clogged by puncturing periodically the nozzle hole using a penetrating needle unit. A developer supplying nozzle apparatus includes a nozzle head(210) for distributing a developer onto a substrate, a plurality of nozzle holes, a plurality of penetrating needles, and a penetrating needle support unit. The plurality of nozzle holes(250) are formed through a bottom of the nozzle head in order to supply the developer supplied into the nozzle head onto the substrate. The plurality of penetrating needles(350) are used for puncturing the nozzle holes, respectively. The penetrating need support unit(310) is used for inserting or deviating the penetrating needles into or from the nozzle holes.</p> |
