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发明名称
Thin film transistor inspection system using surface electron emission device array
摘要
申请公布号
KR100738089(B1)
申请公布日期
2007.07.12
申请号
KR20050135840
申请日期
2005.12.30
申请人
发明人
分类号
H01L21/66;H01L29/786
主分类号
H01L21/66
代理机构
代理人
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