摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tuning-fork type vibrator used for an angular velocity/acceleration sensor used for a vehicle attitude control or the like, capable of preventing decline of detection accuracy of angular velocity and acceleration. <P>SOLUTION: Each detection part of the angular velocity and the acceleration is provided individually by forming angular velocity detection parts 23, 24 on arms 2, 3 of the vibrator 1 and forming an acceleration detection part 25 on a base part 4, and thereby each interference between an angular velocity output and an acceleration output is reduced, to thereby enable highly accurate detection. <P>COPYRIGHT: (C)2007,JPO&INPIT |