| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a burner device capable of uniformly supplying a gas to each burner without using a controller for controlling a gas flow rate to each burner in the supply of a gaseous starting material, a combustible gas such as hydrogen, an assistant gas such as oxygen, a doping gas, an inert gas or the like to a multiple tube burner and a method of manufacturing synthetic quartz glass using the same. <P>SOLUTION: The burner device is used for the manufacture of the synthetic quartz glass and comprises a gas dividing apparatus having a gas introducing port for introducing the gas and many gas dividing ports for dividing the gas introduced from the gas introducing port, many burner main bodies respectively connected to the gas dividing ports through connection means and a gas flow rate control plate which has a gas passing hole bored to have a prescribed dimensional precision diameter and for passing the gas and is connected to the connecting means. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
