| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film bulk acoustic resonator which is small-sized, is capable of suppressing signal interference and loss that occurs in use integrated in a circuit, improves a degree of freedom in design, and is capable of obtaining desired resonant frequency characteristics at low cost. <P>SOLUTION: A conductor pattern film 27 is provided in a Z direction of a resonator body 23 and by laminating the resonator body 23 and the conductor pattern film in the direction of thickness of a piezoelectric thin film 35, a film bulk acoustic resonator 20 can be formed compact even when the conductor pattern film 27 is provided. Since the conductor pattern film 27 is connected to a resonance part 40 in series or in parallel, a difference between a serial resonant frequency and a parallel resonant frequency can be adjusted by changing impedance of the film bulk acoustic resonator 20 using the conductor pattern film 27. Thus, a degree of freedom in design is improved, furthermore, impedance can be adjusted at low cost without connecting any external element, and signal interference and loss can be suppressed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
