| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a process for fabrication of solar battery elements in which a base body is suppressed from being damaged when an etching residue is removed. <P>SOLUTION: The fabrication process includes a roughening process in which a base body for a solar battery element is arranged in a first chamber, and one main surface of the base body is etched by supplying first gas, to roughen the one main surface while an etching residue is stuck. It also includes a residue removing process in which the base body is arranged inside a second chamber, and second gas whose reactiveness is lower than the first gas is supplied to make the second gas into plasma state, so that the etching residue remaining on the one main surface is removed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
