| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method and a control device for a heating furnace capable of adjusting the temperature and flow rate of a gas distributed into the furnace optimally for processing a heated object, even when environmental conditions such as barometric pressure and temperature near the heating furnace, a pressure of the gas distributed into the furnace, and the condition of a wiring board are changed, and reducing its installation area. SOLUTION: This control method comprises a flow rate adjusting process for adjusting the flow rate of the gas distributed into the furnace to a prescribed mass flow rate, a gas heating process for heating the gas adjusted in the flow rate adjusting process, to a predetermined temperature, and a thermal energy adjusting process for adjusting thermal energy of the gas distributed into the furnace to a prescribed value by making the flow rate adjusting process and the gas heating process be in cooperation with each other. COPYRIGHT: (C)2007,JPO&INPIT |
