DESIGN OF A WET/WET AMPLIFIED DIFFERENTIAL PRESSURE SENSOR BASED ON SILICON PIEZO RESISTIVE TECHNOLOGY
摘要
The invention provides pressure sensors for use in wet environments. A pressure sensor package according to the invention has a housing having a pair of cavities separated by a wall member. Sequentially contained within one cavity is a conductive elastomeric seal pad, a pressure sensor and an elastomeric media seal. A pressure cap is attached to the housing such that the pressure cap and the housing together form a hermetic seal. The pressure cap has a port for admitting a gas under pressure into the first cavity. A signal amplifier is positioned within the second cavity and a cover encloses the signal amplifier within the second cavity. An electrical connector through the wall member forms an electrical connection between the pressure sensor and the signal amplifier. A lead frame extends through the housing and forms electrical connections with the pressure sensor and the signal amplifier.
申请公布号
WO2007078748(A2)
申请公布日期
2007.07.12
申请号
WO2006US47441
申请日期
2006.12.13
申请人
HONEYWELL INTERNATIONAL INC.;SADASIVAN, SARAVANAN;MUNIRAJU, RAGHAVENDRA;SELVAN, THIRUMANIA, A.;SHENOY, GURURAJ, U.
发明人
SADASIVAN, SARAVANAN;MUNIRAJU, RAGHAVENDRA;SELVAN, THIRUMANIA, A.;SHENOY, GURURAJ, U.