| 摘要 |
An apparatus for manufacturing a semiconductor device is provided to stably sense temperature of a chamber by shielding high-frequency noise. A chuck is installed in a process chamber. A wafer is loaded into the chuck. A temperature sensor unit(130) is installed in the process chamber in order to sense the temperature of the chuck and to shield high-frequency noise. The temperature sensor unit includes a plurality of sensing modules(132) for sensing the temperature, a connector(133) connected to the signal line for transferring a temperature sensing signal between the sensing module and the chuck, and a cover(134) for covering the sensing module and the connector.
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