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发明名称
Electrical probe apparatus for measuring the characteristics of semiconductor material
摘要
申请公布号
US3134077(A)
申请公布日期
1964.05.19
申请号
US19610138688
申请日期
1961.09.18
申请人
TEKTRONIX, INC.
发明人
IV THOMAS B. HUTCHINS;MYERS WILLIAM C.;DELORD JEAN F.
分类号
G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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