发明名称 PROBER FRAME AND LIQUID CRYSTAL SUBSTRATE INSPECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To easily insert a positioning pin into a positioning bush regardless of a change in the pitch between bushes. SOLUTION: In a prober for inspecting a liquid crystal substrate for supplying an inspection signal to the liquid crystal substrate, a prober frame 3 for composing the prober 2 has a plurality of positioning bushes 4, 5 where the positioning pin 16 is freely taken out and put, and at least one of the positioning bushes has a roller mechanism 6 sliding with the positioning pin. By allowing the positioning bush to have a roller mechanism for absorbing the positioning deviation of the prober frame, the positioning deviation is absorbed so that the positioning pin is easily inserted into the bush even if the pitch between the positioning bushes changes. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007178410(A) 申请公布日期 2007.07.12
申请号 JP20050380461 申请日期 2005.12.28
申请人 SHIMADZU CORP 发明人 KONISHI YASUO;TANAKA TAKESHI
分类号 G01R31/00;G02F1/13;G02F1/1368 主分类号 G01R31/00
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