| 摘要 |
PROBLEM TO BE SOLVED: To examine a physical property of a target of inspection having one of its surfaces covered with a member resistant to transmission of laser light or a magnetic field, a semiconductor IC mounted on a substrate for example, by a laser SQUID microscope with higher sensitivity. SOLUTION: An apparatus for detecting an induced magnetic field is structured so that a laser light 2 irradiates the target 16 to be inspected from the same side where a pickup coil 15 for magnetic field detection and irradiation with the laser light 2 and the detection of the magnetic field induced by irradiation with the laser light take place on the same side with respect to the target 16. The laser light 2 irradiates to the target 16 through the loop-like pickup coil 15 placed inside a container 19. COPYRIGHT: (C)2007,JPO&INPIT
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