发明名称 |
Anisotropic conductive sheet |
摘要 |
The object of the invention is to provide an anisotropic conductive sheet which obtains good conductivity without damaging a wafer of a semiconductor nor electrode terminals of a conduction measurement instrument due to loading during inspection of the wafer. An anisotropic conductive sheet 1 of the invention is formed such that a porous resin layer is formed on inner walls of a plurality of through holes perforated in the thickness direction of an electrically insulating porous sheet 2 , and the surfaces of skeletons of the porous resin are coated with metal. Examples of the porous resin layer include those which are obtained by means of foaming a fluororubber or a tetrafluoroethylene-propylene copolymer rubber, having an open-cell structure, and cross-liking the same through irradiation with electron beams. The sheet is particularly favorable for a porous resin.
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申请公布号 |
US2007160808(A1) |
申请公布日期 |
2007.07.12 |
申请号 |
US20050547024 |
申请日期 |
2005.03.30 |
申请人 |
OKUDA YASUHIRO;FUJITA TARO |
发明人 |
OKUDA YASUHIRO;FUJITA TARO |
分类号 |
B32B3/10;H01R11/01;H01B5/16;H01R13/24 |
主分类号 |
B32B3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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