SHEET RELEASING DEVICE AND SHEET RELEASING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a sheet releasing device which peels the sheetlike base material bonded to a mold from the mold by transferring the fine pattern provided to the mold to the substrate and hardly collapses the pattern even if the aspect ratio of the transferred pattern is large. SOLUTION: The sheet releasing device 57 is constituted so as to peel the sheetlike base material 3 bonded to the mold 11 from the mold 11 when the fine pattern provided to the mold 11 is transferred to the molding target 9 thinly provided to one side of the base material 3 and has a peeling means 59 for peeling the base material 3 while gradually advancing an almost linearly peeled region from one end part of a transfer surface 13 to the other end part thereof. COPYRIGHT: (C)2007,JPO&INPIT