| 摘要 |
PROBLEM TO BE SOLVED: To attain satisfactory optical inspection of high S/N ratio, even when an inspected object is a phase object of generating hardly luminous energy changes of a reflected light, a scattered light and a transmission light. SOLUTION: A laser beam emitted from a light source 11 is introduced into an optical fiber having a core for propagating the laser beam, a light spot is formed in a tip part area of a probe part 22 provided in an emission side end part of the optical fiber, the inspected object 2 is scanned with the light spot, and a phase change is detected in the inspection light via the inspected object 2. COPYRIGHT: (C)2007,JPO&INPIT
|
