| 摘要 |
An image sensor test apparatus that emits light to a light receiving surface of an image sensor (DUT) and inputs and outputs electrical signals from a contact part to input and output terminals of the image sensor so as to test the image sensor (DUT) for optical characteristics, which captures an image of the image sensor (DUT) in the state held by a contact arm ( 315 ) by a first camera ( 326 ), recognizes a relative position of the image sensor (DUT) with respect to the contact part by image processing, adds a precalculated amount of deviation of an optical axis of the image sensor (DUT) with respect to an optical axis of a light source to that relative position to calculate an amount of alignment of the image sensor (DUT), drives a drive unit ( 322 ) based on this, and moves a holding side arm ( 317 ) abutting against a movable stage ( 321 ) with a lock-and L-free mechanism ( 318 ) in a free state.
|
