发明名称 PROCESS DEVELOPMENT AND OPTIMIZATION OF EMBEDDED THIN FILM RESISTOR ON BODY
摘要 The present invention includes an apparatus including a thin film resistor. The thin film resistor includes a resistive component, a body, and a reactant. The resistive component includes a nickel-composite material. The body has a predetermined, sturdy shape. The body carries the resistive component. The reactant manipulates the body to enable the resistive component to adhere to the body.
申请公布号 WO2007047627(A3) 申请公布日期 2007.07.12
申请号 WO2006US40463 申请日期 2006.10.16
申请人 GEORGIA TECH RESEARCH CORPORATION;BHATTACHARYA, SWAPAN, K.;HORST, STEPHEN;PAPAPOLYMEROU, IOANNIS;TENTZERIS, MANOS 发明人 BHATTACHARYA, SWAPAN, K.;HORST, STEPHEN;PAPAPOLYMEROU, IOANNIS;TENTZERIS, MANOS
分类号 H01L21/8222 主分类号 H01L21/8222
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