HORN, HORN UNIT, AND BONDING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a horn capable of restraining vibration components in directions other than a horizontal direction, and to provide a horn unit, and to provide a bonding apparatus that uses the horn unit. SOLUTION: The horn 50 is vibrated by a vibrator 42. A section vertical to the longitudinal direction (X direction) of the horn 50 comprises: a first region A1 extended in the Z direction; and a pair of second regions A2 for holding the first region A1 from a direction (Y direction) orthogonally crossing the Z direction. An area S1in the first region A1 is maximized, at a position P3 equivalent to the antinode of standing waves in vibration excited by the horn 50, and an area S2at the second region A2 is minimized. The area S1in the first region A1 decreases toward positions P2, P4 that are equivalent to a node from the position P3 equivalent to the antinode of standing waves. Since a sectional change section 54, in which the area S2in the second region A2 increases, is included, thus restraining the vibration components in directions other than the X direction. COPYRIGHT: (C)2007,JPO&INPIT