发明名称 |
SUBSTRATE RESIN LAMINATED STRUCTURE AND OPTICAL WAVEGUIDE MODULE |
摘要 |
PROBLEM TO BE SOLVED: To improve the joining strength between a resin layer and a substrate by using an intermediate layer of a new structure in a substrate resin laminated structure in which the resin layer is laminated on the surface of the substrate such as a Si substrate. SOLUTION: A surface-modified film 15 (SiO<SB>2</SB>heat-oxidized film) is formed on the surface of the Si substrate 12 by heat oxidation etc. At least one oxidized film 16 (SiOx film) is formed on the surface-modified film 15 by a spatter or CVD, and the resin layer is formed on the oxidized film 16. The density of the oxidized film 16 is greater than that of the surface-modified film 15. COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2007175891(A) |
申请公布日期 |
2007.07.12 |
申请号 |
JP20050373928 |
申请日期 |
2005.12.27 |
申请人 |
OMRON CORP |
发明人 |
TANIGUCHI HISASHI;OMURA HIDEKAZU |
分类号 |
B32B27/00;B32B9/00;B32B15/082;G02B6/12;G02B6/122;G02B6/30 |
主分类号 |
B32B27/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|