| 摘要 |
PROBLEM TO BE SOLVED: To apply a fluid material along a predetermined coating direction on a substrate regardless of attitudes of the substrate to be conveyed. SOLUTION: The coating apparatus 1 is provided with: a substrate holding part 11 for holding the substrate 9; a coating head 14 for continuously discharging an organic EL solution toward the substrate 9; a head moving mechanism 15 and a substrate moving mechanism 12 which are used for moving the coating head 14 relatively to the substrate 9 to the main scanning direction and the subscanning direction; and a substrate turning mechanism 13 for turning the substrate 9 by 90°together with the substrate holding part 11. A substrate attitude changing part 21 of a control part 2 of the coating apparatus 1 controls the substrate turning mechanism 13 on the basis of the attitude of the substrate 9 to be conveyed and the coating direction of the organic EL solution to be applied onto the substrate 9, which are stored beforehand in a storage part 3, so that the substrate 9 is turned by 90°, if necessary, to change the attitude of the substrate 9. As a result, the organic EL solution can be applied along the coating direction to be predetermined on the substrate 9 regardless of attitudes of the substrate 9 to be conveyed. COPYRIGHT: (C)2007,JPO&INPIT
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