ALL-SOLID-STATE UV LASER SYSTEM

摘要

The present invention relates to an all-solid state UV laser system comprising at least one semiconductor laser (10) in a VECSEL configuration. The gain structure (3) in this semiconductor laser (10) emits fundamental radiation in a wavelength range which can be frequency doubled to wavelengths in the UV region. The frequency doubling is achieved with a nonlinear optical crystal (6) for second harmonic generation arranged inside the extended cavity of the semiconductor laser (10). By electrically pumping of the semiconductor laser wavelengths below 200 nm can be efficiently generated with already known semiconductor materials like GaN. The proposed UV laser system is compact and can be fabricated and operated at low costs compared to UV excimer lasers.