发明名称 VARIABLE RESISTANCE ELEMENT AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a variable resistance element having a structure in which the area of an electrically contributing region of a variable resistance element is minutely smaller than an area defined by an upper electrode or a lower electrode, and to provide a manufacturing method thereof. SOLUTION: The cross-sectional shape of a current path in which a current flows between two electrodes via a variable resistor in applying a voltage pulse between the two electrodes is formed with a line width smaller than the line width of both the two electrodes, and is formed with a line width smaller than the minimum processing size in a manufacturing process. Thus, the area of the element is made to be smaller than that of an electrically contributing region of a conventional variable resistance element. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007180474(A) 申请公布日期 2007.07.12
申请号 JP20060125766 申请日期 2006.04.28
申请人 SHARP CORP 发明人 HOSOI YASUNARI;ISHIHARA KAZUYA;SHIBUYA TAKAHIRO;ONISHI TETSUYA;NAKANO TAKASHI
分类号 H01L27/10 主分类号 H01L27/10
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