| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation source capable of maximizing the cracking effect of organic matter particles flocculable upon the evaporation of an organic matter, and to provide a method of depositing a thin film using the same. SOLUTION: The invention refers to an evaporation source capable of maximizing the cracking effect of evaporation particles flocculable upon the evaporation of an organic material, and a method of depositing a thin film using the same. In the evaporation source provided with: a crucible storing an organic matter as an organic thin film material and having a heating unit ; and at least one spray nozzle of spraying the organic matter on a substrate, the crucible has at least one baffle arranged onto a moving path of the organic matter to be evaporated, and the spray nozzle has a shower head structure capable of shielding radiant heat. COPYRIGHT: (C)2007,JPO&INPIT
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