| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation device for a vacuum carburizing furnace having a mechanical booster pump on a first stage side of an oil-sealed pump and capable of preventing adhesion/deposition of soot and tar in the mechanical booster pump. SOLUTION: In the evacuation device 5 for the vacuum carburizing furnace 1, an oil-sealed pump 7 as a pump for evacuation and a mechanical booster pump 8 provided on its previous stage side are provided on an exhaust conduit 6 connected to a furnace body. An oil feeder 10 is provided to feed an oil for the oil-sealed pump 7 into the exhaust conduit 6 on the suction side of the mechanical booster pump 8. COPYRIGHT: (C)2007,JPO&INPIT
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