| 摘要 |
PROBLEM TO BE SOLVED: To improve the washing capability of the in-liquid washing system by efficiently jetting a washing fluid jetted out of a nozzle to an object to be washed while keeping the washing fluid at a high speed as it is, in the in-liquid washing system capable of carrying out washing treatment for an object to be treated which is immersed in an immersion liquid. SOLUTION: Washing treatment is carried out using a multi-phase fluid, as a washing fluid 9, composed of a liquid and a gas jetted straightly from the tip end of a jetting nozzle 10. Substantially, the washing fluid 9 is made to be a three-phase fluid composed of three kinds of fluids; a liquid-phase 25 of a pressurized liquid, a first mixture-phase 26 consisting of a pressurized gas and a pressurized liquid surrounding the circumference of the liquid-phase 25, and a second mixture-phase 27 consisting of a pressurized gas and an immersion liquid surrounding the circumference of the first mixture-phase 26. COPYRIGHT: (C)2007,JPO&INPIT
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