发明名称 Laser ablation and imprinting hybrid processing for fabrication of high density interconnect flip chip substrates
摘要 In some embodiments, laser ablation and imprinting hybrid processing for fabrication of high density interconnect flip chip substrates are presented. In this regard, a substrate in introduced having a dielectric layer wherein material has been removed from a surface and the cavity has been plated with conductive material resulting in a feature width of less than about 10 micrometers. Other embodiments are also disclosed and claimed.
申请公布号 US2007158854(A1) 申请公布日期 2007.07.12
申请号 US20050319997 申请日期 2005.12.27
申请人 INTEL CORPORATION 发明人 LOTZ STEFANIE M.
分类号 H01L23/48;H01L23/52;H01L29/40 主分类号 H01L23/48
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