申请人 |
LAM RESEARCH CORPORATION;FREER, ERIK, M.;DE LARIOS, JOHN, M.;MIKHAYLICHENKO, KATRINA;RAVKIN, MICHAEL;KOROLIK, MIKHAIL;REDEKER, FRED, C.;THOMAS, CLINT;PARKS, JOHN |
发明人 |
FREER, ERIK, M.;DE LARIOS, JOHN, M.;MIKHAYLICHENKO, KATRINA;RAVKIN, MICHAEL;KOROLIK, MIKHAIL;REDEKER, FRED, C.;THOMAS, CLINT;PARKS, JOHN |