发明名称 SEMICONDUCTOR MEMORY ELEMENT AND ULTRASONIC SENSOR
摘要 <p>A semiconductor element, a semiconductor sensor, and a semiconductor memory element are provided, in which an MFMIS structure having a lower electrode and an integrated circuit can be integrated. An epitaxially grownγ-Al2O3 single crystal film (2) is disposed on a semiconductor single crystal substrate (1), and an epitaxial single crystal Pt thin film (3) is disposed on theγ-Al2O3 single crystal film (2).</p>
申请公布号 KR100738852(B1) 申请公布日期 2007.07.12
申请号 KR20057017467 申请日期 2005.09.16
申请人 发明人
分类号 H01L27/10;H01L27/105;H01L21/336;H01L21/8246;H01L21/8247;H01L29/78;H01L29/788;H01L29/792;H01L37/02 主分类号 H01L27/10
代理机构 代理人
主权项
地址