ORGANIC LIGHT EMITTING DEVICE COMPRISING SURFACE-TREATED BOTTOM ELECTRODE

摘要

An organic light emitting device having a surface-treated bottom electrode is provided to lower an operation voltage and obtain the reliability of a performance by maintaining surface roughness of the electrode as a state before an ion milling process. An organic light emitting device having a surface-treated bottom electrode includes the steps of: sequentially stacking a bottom electrode, an organic layer having a light emitting layer, and an upper electrode; and etching a surface of the bottom electrode through an ion beam before the organic layer is stacked. A foreign substance on the bottom electrode is removed by an ion beam etching process. A part or whole of the bottom electrode is patterned by a photolithography process. The foreign substance generated in the photolithography process is removed by the ion beam etching process. The foreign substance is an oxide film. The bottom electrode is a negative electrode.