| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a patterned body with which a patterned body subjected to a vacuum UV light irradiation treatment in a high-definition pattern using vacuum UV light can be manufactured with high sensitivity. <P>SOLUTION: The method for manufacturing a patterned body is characterized in that a patterned product having a pattern forming surface subjected to a vacuum UV light irradiation treatment in a pattern state is manufactured through: a metal mask fixing step of disposing a metal mask on the pattern forming surface of a pattern forming substrate and fixing the metal mask with a magnet through the opposite face side to the pattern forming surface of the pattern forming substrate; and a vacuum UV light irradiation step of irradiating the pattern forming surface with vacuum UV light through the metal mask fixed to the pattern forming surface. <P>COPYRIGHT: (C)2007,JPO&INPIT |
