| 摘要 |
PROBLEM TO BE SOLVED: To provide a transferring device capable of effecting correct transfer with a simple constitution, in the transferring device which transfers a micropattern on a die to a substrate. SOLUTION: The transferring device 1 transfers a transfer pattern onto the substrate W by pushing the substrate W by the die M1 with the micropattern for transferring which is formed thereon. Elastic members 7, 11 are provided on at least one side of the rear surface side of the substrate W or the rear surface side of the die M1. COPYRIGHT: (C)2007,JPO&INPIT
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