| 摘要 |
The system includes a first conveying vehicle for holding and conveying wafers as products finished with an inspection step from a stock storage shelf group 11 to a reloading device 17 , and a second conveying vehicle for holding and conveying a transporting container from a reloading device to a transporting storage shelf group: wherein a traveling course of the first conveying vehicle is provided on one side of the reloading device and a traveling course for the second conveying vehicle is provided on the other side; the reloading device includes a first mounting table for mounting the conveying container, a second mounting table for mounting the transporting container, and a reloading device for reloading wafers in the conveying container mounted on the first mounting table to the transporting container mounted on the second mounting table; and the installed number of the first mounting tables is larger than that of the second mounting tables.
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