| 摘要 |
<p>A laser repair apparatus is provided to induce a light gradient of an edge to be increased at a focus plane of laser light by inserting a phase shift blade into a path of the laser light. A laser repair apparatus includes a laser optical source(200), a lens unit(310,330), a first blade, and a second blade. The laser optical source(200) emits laser light which repairs an error generated in a mask pattern. The lens unit(310,330) collects the laser light to an error phase. The first blade has a first transparent substrate, a first shading pattern, and a first phase shift layer, and limits an amplitude of the laser light. The first shading pattern sets a first floodlight region through which the laser light is penetrated. The first phase shift layer is installed on a side part of the first shading pattern. The second blade has a second transparent substrate, a second shading pattern, and a second phase shift layer, and is installed to be overlapped with the first blade. The second shading pattern sets a second floodlight region through which the laser light is penetrated. A size of the laser light is changed by changing a relative position of the second blade for the first blade.</p> |
