HEAT TREATMENT SYSTEM

摘要

A heat treatment system is provided to reduce a manufacturing cost and enhance spatial efficiency by heating a process gas by using a wet oxidation combustion system. A heat treatment system(1) includes a heating unit which is installed at a gas introduction path in order to heat a process gas at predetermined temperature before supplying the process gas to a reaction vessel. The gas introduction path(5) is disposed between the reaction vessel and the heating unit and includes an internal tube and an external tube. The process gas is supplied through the gas introduction path to the heating unit. The process gas is preheated at the predetermined temperature and the preheated process gas is supplied through the gas introduction path to the reaction vessel.