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发明名称
HIGH RESOLUTION PROJECTION MEANS FOR PRINTING MICRO CIRCUITS ON PHOTORESIST MATERIAL
摘要
申请公布号
US3573456(A)
申请公布日期
1971.04.06
申请号
USD3573456
申请日期
1967.07.26
申请人
OPTO MECHANISMS INC.
发明人
ROLAND C.M. BEEH
分类号
G03F7/20;(IPC1-7):G03B27/32
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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