| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce a hole drilling pitch by making dross hardly stuck around a drilled hole and lessening the spread of a hole diameter on the side of a laser irradiation face. <P>SOLUTION: A YAG laser beam LB from a laser beam emitting unit 32 is converged to the hole drilling point W of a workpiece 38 and the point W is irradiated with the beam, in a state that a vacuum cylindrical body 40 is arranged between the emitting unit 32 and the workpiece 38 on a machining stage 36, in more detail, in a state that the vacuum cylindrical body 40 is made to cover the upper face (laser irradiation face) of the workpiece 38 with the hole drilling point W situated inside the cylinder, and further, under the condition that a negative pressure (vacuum) from a vacuum source 46 is supplied into the vacuum cylindrical body 40. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
