| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for continuously producing NF<SB>3</SB>industrially safely with a high yield by a direct fluorination process of reacting F<SB>2</SB>gas with NH<SB>3</SB>gas. SOLUTION: The method for producing nitrogen trifluoride comprises the steps of feeding each of a mixed gas A of fluorine gas and a diluting gas and a mixed gas B of ammonia gas and the diluting gas, wherein at least one of the fluorine gas, the ammonia gas and the diluting gas is in a cooled state, to a tubular reactor having a cooling structure from a gas introduction tube whose opening part is arranged toward the center of the cross section of the tubular reactor, and reacting the fluorine gas and the ammonia gas in a vapor phase in the presence of the diluting gas under such conditions that the temperature is≤60°C, the gas residence time is≤20 s and no-catalyst exists, to thereby produce a gaseous product mainly comprising nitrogen trifluoride and a solid product mainly comprising ammonium fluoride and/or acidic ammonium fluoride. COPYRIGHT: (C)2007,JPO&INPIT
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