| 摘要 |
PROBLEM TO BE SOLVED: To convey a substrate so as not to generate spots on a coating film on a glass substrate. SOLUTION: A first conveying body 100 and a second conveying body 101 are provided on front and rear sides of a stage 70 of a resist coating treatment unit 24. The second conveying body 101 has a plurality of rolls 110 arranged in a Y direction; a hand 111 for supporting the rolls 110; and a rail plate 112 mounted with the hand 111. Further, a rotation drive part 113 for rotating the roll 110 and a horizontal drive part 114 for advancing/retreating the hand 111 in the Y direction are provided on the hand 111. A group of independently liftable lifting pins is provided on the stage 70, the rolls 110 intrude below the glass substrate G in such a state that the glass substrate G is elevated by the group of lifting pins, and the glass substrate G is handed over to the rolls 110. The rolls 110 retreat while rearwardly feeding the glass substrate G by rotation at a low speed. COPYRIGHT: (C)2007,JPO&INPIT
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