发明名称 PURIFICATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a purification apparatus for sublimation, distillation, or the like capable of preventing its contamination and obtaining purified object substances with a high purity in a high yield. SOLUTION: The purification apparatus has a purifying part for gasifying and purifying substances, a fixing means for fixing the purifying part, and a temperature controlling means installed near to the purifying part and for giving a temperature gradient to the purifying part. The purifying part includes a first purifying tube and a second purifying tube, and the first purifying tube is loosely fitted into the neighboring second purifying tube. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007175698(A) 申请公布日期 2007.07.12
申请号 JP20060315110 申请日期 2006.11.22
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 NAKAJIMA HARUE;KAWAKAMI SACHIKO
分类号 B01D8/00;B01D3/00 主分类号 B01D8/00
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