| 摘要 |
PROBLEM TO BE SOLVED: To provide a particulate recovering apparatus having a chamber for recovering particulates which easily takes out target particulates outside. SOLUTION: The chamber for recovering the particulates as a recovering part for recovering the particulates, a laser beam irradiation part and a passage for flowing a gas or a liquid between the recovering part and the laser beam irradiation part, and the recovering part is arranged to make an opening face to the side of the passage, wherein the laser beam irradiation part has at least one laser beam irradiation opening, from which a laser beam is made to intersect the passage. The particulate recovering apparatus operating in this way has a concave hollowed part at at least a part of the chamber for recovering the particulates and a hole possible to be opened and closed at the upper part of the chamber for recovering particulates corresponding to a position of the concave hollowed part. COPYRIGHT: (C)2007,JPO&INPIT
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