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发明名称
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
摘要
申请公布号
KR100738443(B1)
申请公布日期
2007.07.12
申请号
KR20010008572
申请日期
2001.02.21
申请人
发明人
分类号
H01L21/304;H01L21/31
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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